Photoresist
Unicon Technology - providing comprehensive metrology and testing solutions for photoresist processes
In semiconductor manufacturing, photoresist serves as a key carrier for pattern transfer. The precise control of its coating thickness, pattern morphology, and mechanical properties directly determines the precision and yield of circuits. Unicon Technology Co., LTD., as an instrument agency, integrates a variety of measurement devices to provide full-chain support for the research and development, process optimization and quality control of photoresist, ranging from thin film measurement, 3D topography analysis to mechanical property testing. Our equipment covers multiple key application scenarios in the photoresist process.
The specific application of Unicon equipment in the photoresist process:
| Equipment category | Product model/name | The main applications in the field of photoresist |
|---|---|---|
| Film thickness measurement | Filmetrics F20/F50 Film thickness gauge | Measure the thickness (1nm-10mm), uniformity and refractive index of the photoresist coating |
| Ellipsometer | Film Sense FS-8 ellipsometer | Precisely measure the ultra-thin thickness of photoresist (0-1000nm) and optical constants (n,k values) |
| Profilometer | KLA Profile 3D Optical profilometer | The 3D topography, key dimensions (CD), side wall angles and step heights of the photoresist after patternization |
| Step instrument | KLA P-7 probe-type profilometer | The height and roughness of 2D/3D steps after the photoresist is patterned |
Summary
From photoresist coatingControl of film thickness and uniformityFrom the time of exposure and developmentGraphical structure analysisFor instance, Unicon Technology can provide precise and efficient measurement solutions for key dimensions and side wall angles.
If you encounter any measurement challenges in the photoresist process or wish to obtain the latest detailed technical data and application cases of the above-mentioned equipment, please feel free to contact us at any time.The professional team of Unicom Technology will provide you with personalized product selection and technical support services.
