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Filmetrics F60-t Automatic Light Reflection film thickness gauge

The Filmetrics F60-t automatic light reflection film thickness gauge is just like our F50 film thickness measuring instrument product. The main mapping focuses on the thickness and refractive index of the film. But it has added many functions for the production environment. These functions include automatic groove detection, automatic reference determination, fully enclosed measurement platforms, industrial computers pre-installed with software, and models upgraded to fully automated wafer transfer.

  • Name: 自動光反射膜厚儀
  • Brand : Filmetrics
  • Product model : F60
  • Place of Origin: 美國


Filmetrics F60-t Automatic light reflection film thickness gauge



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Product Introduction of Filmetrics F60-t Automatic Light Reflection Film Thickness Gauge

Filmetrics F60-t Automatic light reflection film thickness gaugeJust like oursF50White light interference film thickness measuring instrumentThe products are the same. Main surveying and mappingFilm thicknessandRefractive index. But it has added many functions for the production environment. These functions include automatic groove detectionAutomatic benchmark determinationFully enclosed measurement platforms, industrial computers pre-installed with software, and models that can be upgraded to fully automated wafer transfer.



Features and advantages of Filmetrics F60-t automatic Light Reflection film thickness gauge

  • The automated film thickness drawing system enables rapid positioning and real-time result acquisition.

  • Measurable sample film layer: Basically smooth. Non-metallic films can all be measured.

  • All systems use intuitive standard analysis software;

  • Automatic detection of grooves

  • Automatic benchmark determination

  • Fully enclosed measurement platform


Measurement principle of Filmetrics F60-t automatic light reflection film thickness gauge product:

When incident light passes through the interfaces of different substances, some of the light will be reflected. Due to the wave nature of light, the reflected light from multiple interfaces interferes with each other, causing the multi-wavelength spectrum of the reflected light to oscillate. From the oscillation frequency of the spectrum, the distance between different interfaces can be determined, and thus the thickness of the material can be obtained (the more oscillations, the greater the thickness). At the same time, other material properties such as refractive index and roughness can also be obtained.

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Filmetrics F60-t automatic light reflection film thickness gauge product application

Semiconductor film layer

Display technology

Consumer electronics

Parrylin

Photoresist

OLED

Waterproof coating

Electronic products/Circuit board

Dielectric layer

ITOandTCOs

Radio Frequency Identification

Magnetic material

Gallium arsenide

Thick air box

Solar cell

Medical devices

Micro-electromechanical system

PVDandCVD

Aluminum shell anode film

Silicone rubber



Product parameters of Filmetrics F60-t Automatic Light Reflection Film Thickness Gauge

Wavelength range

190nm-1340nm

Light source

Tungsten halogen lamp

Spot size

Standard1.5Millimeters (minimum achievable.150mum)

Measurement accuracy

0.02 nm

Accuracy*Take the larger one

1nmor0.2%

Stability

0.05 nm

For more parameters, please contact us



Measurement diagram of Filmetrics F60-t automatic light reflection film thickness gauge

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Tags: KLA Filmetrics

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