HORIBA Smart SE Ellipsometric Spectrometer
Product Introduction of HORIBA Smart SE Ellipsometric Spectrometer:
HORIBA Smart SE Ellipsometric SpectrometerIt is a thin film measurement tool. With just a few simple buttons, sample measurement and analysis can be automatically completed within seconds, and a complete film property analysis report can be provided, including film thickness, optical constants, surface roughness, and film inhomogeneity, reflectance or transmittance. It is a solution for rapid thin-film measurement and device quality control. Designed for thin film measurement, one-click operation.
Product features of HORIBA Smart SE Ellipsometric Spectrometer:
It can achieve rapid measurement within the wavelength range of 450nm to 1000nm (within 1 second).
Multiple software options for spot size
Automatic loading and adjustment of sample height (automatic platform required)
Large-area automatic imaging (requires an automatic platform)
Temperature control console, liquid sample cell, electrochemical reaction cell
A variety of accessories such as sealed gas cells and permeability curve measurement
Product advantages of HORIBA Smart SE Ellipsometric Spectrometer:
Light spot visualization systemThe HORIBA Smart SE ellipsometric spectrometer is equipped withMyAutoView spot visualization SystemIt can clearly observe the smooth or rough surface of the sample, ensuring that users can position the measurement spot at the measurement position on the sample target.
Intelligent diagnosisThe maintenance of the HORIBA Smart SE ellipsometry spectrometer is very simple. With the help of a complete operation wizard, it can automatically detect and diagnose problems and handle faults
Flexible and multi-functional optionsHORIBA Smart SE ellipsometric spectrometerThe incident Angle is adjustableIt can also be used for online real-time monitoring and has flexibility.
Measurement principle of HORIBA Smart SE Ellipsometric Spectrometer product:
HORIBA Smart SE ellipsometerIt is a non-contact measurement method for film thickness measurement that utilizes the optical properties of thin films. The thickness and refractive index of the film are measured based on the state changes of polarized light during reflection or transmission. When polarized light shines on the surface of a film, the polarization state of the reflected or transmitted light will change. This change depends on the thickness of the film, its refractive index, as well as the polarization state and Angle of the incident light. By analyzing these changes, the thickness of the film can be accurately deduced.
HORIBA Smart SE Ellipsometric Spectrometer Software:
The ellipsometry spectroscopy software DeltaPsi2 is feature-rich. It is based on the WindowsT operating system and fully utilizes the hardware features of HORIBA Scientific (JobinYvon spectroscopy technology) ellipsometers. It has numerous modeling and fitting processing functions, as well as a simple operation interface. It can provide researchers with convenient ellipsometric analysis methods.
Gradient film layer
Roughness or interface
Material composition/crystallinity
Anisotropic film layer
The non-uniformity of film thickness
Deskewness factor
A complete property database related to material model formulas
Automatic correction of background light for thick transparent sample substrates
Periodic variation structure
The BLMC algorithm for users' ultra-thin film applications
Multiple guesses, multiple initial values, multiple models, correlations...
Common applications of HORIBA Smart SE Ellipsometric spectrometer:
Interface characteristics | Surface measurement | Optical properties | Thickness measurement |
Amorphous silicon, polycrystalline silicon | Roughness | Optical constants (n, k | From a few angstroms to 15 μ m |
Nano-crystalline silicon | Natural oxide thickness | Optical band gap Eg | Single-layer and multi-layer films |
Transparent conductive oxide | Surface film thickness | Transmittance |
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Anti-reflection coating | Depolarization coefficient |
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Semiconductor | Flat panel display | Functional coatings | Biological and Chemical Engineering |
Dielectric film | TFT | Optical coating | Organic film |
Metal film | OLED | Anti-reflection type, self-cleaning type | Thin-film adsorption |
Polymers, photoresists | Plasma display panel | Surface coating and treatment | Surface function treatment |
PZT membrane | Flexible display board | Organic materials |
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Product parameters of HORIBA Smart SE Ellipsometric Spectrometer:
Spot size | 500μmX500μm,250μmX500μm, 250μmX250μm,100μmX250μm, 150μmX250μm,100μmX500μm, 75μmX150μm |
Test time | 5s, Max1s | Visual system | MyAutoView |
For more parameters, please contact us |
Measurement diagram of HORIBA Smart SE Ellipsometric spectrometer:
