Filmetrics F54-XYT-300 Automatic optical film thickness measuring instrument
Product Introduction of Filmetrics F54-XYT-300 Automatic Optical Film Thickness Measuring Instrument
Filmetrics F54-XYT-300 Automatic optical film thickness measuring instrumentWithF54-XYT-300theSpectral reflection systemIt can be measured quickly and easily200 x 200mmThe film thickness of the sample. ElectricXYThe workbench automatically moves to the selected measurement point and provides rapid thickness measurement at a speed of two points per second.
Product features and advantages of Filmetrics F54-XYT-300 automatic optical film thickness Measuring instrument
The automated film thickness drawing system enables rapid positioning and real-time result acquisition.
Measurable sample film layer: Basically smooth. Non-metallic films can all be measured.
The surveying and mapping results are available2Dor3DPresentation, facilitating users to view from different perspectives;
Measurement principle of Filmetrics F54-XYT-300 automatic optical film thickness gauge
When incident light passes through the interfaces of different substances, some of the light will be reflected. Due to the wave nature of light, the reflected light from multiple interfaces interferes with each other, causing the multi-wavelength spectrum of the reflected light to oscillate. From the oscillation frequency of the spectrum, the distance between different interfaces can be determined, and thus the thickness of the material can be obtained (the more oscillations, the greater the thickness). At the same time, other material properties such as refractive index and roughness can also be obtained.
Filmetrics F54-XYT-300 Automatic optical film thickness gauge Product Application and film layer examples:
Semiconductor film layer | Display technology | Consumer electronics | Parrylin |
Photoresist | OLED | Waterproof coating | Electronic products/Circuit board |
Dielectric layer | ITOandTCOs | Radio Frequency Identification | Magnetic material |
Gallium arsenide | Thick air box | Solar cell | Medical devices |
Micro-electromechanical system | PVDandCVD | Aluminum shell anode film | Silicone rubber |
Common industrial applications of Filmetrics F54-XYT-300 automatic optical film thickness measuring instrument:
Semiconductor manufacturing | LCD liquid crystal display | Optical coating | MEMS Micro-electromechanical systems |
Photoresist | Polyimide | Hard coating | Photoresist |
Oxide/Nitride/SOI | ITOTransparent conductive film | Anti-reflective coating | Silicon-based film layer |
Back grinding of the wafer |
|
|
|
Product parameters of Filmetrics F54-XYT-300 Automatic Optical Film Thickness Measuring Instrument
Wavelength range | 190nm-1700nm | Light source | Tungsten halogen lamps, deuterium lamps |
MeasurementnkThickness requirement1: | 50nm | Measurement accuracy2: | 0.02 nm |
Accuracy*Take the larger one | 1nmor0.2% | Stability3: | 0.05 nm |
Sample size | ≤ diameter300millimeter | Speed (including vacuum platform) : | 5A dot-8seconds 25A dot-21seconds 56A dot43seconds |
Spot size | Standard aperture of 500 microns | Optional 250-micron aperture | Optional 100-micron aperture |
5XObjective lens | 100mum | 50mum | 20mum |
10XObjective lens | 50mum | 25mum | 10mum |
15XObjective lens | 33mum | 17mum | 7mum |
50XObjective lens | 10mum | 5mum | 2mum |
Measurement diagram of Filmetrics F54-XYT-300 automatic optical film thickness gauge
