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Filmetrics F32 Light Reflection film thickness gauge

The special spectral analysis system of the Filmetrics F32 light reflection film thickness gauge adopts a half-width 3u rack-mount chassis. With an additional spectrometer, it can reach four different positions (up to two positions for the EXR and UVX versions). The software of the F32 film thickness gauge can be controlled to start/stop/reset the measurement through digital I/O or the host software. The measurement data can be automatically exported to the host software for statistical process control. Optional lens assemblies are also provided for easy integration into existing production facilities.

  • Name: 光反射式膜厚儀
  • Brand : Filmetrics
  • Product model : F32
  • Place of Origin: 美國(guó)


Filmetrics F32 Light reflection type film thickness gauge



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Product Introduction of Filmetrics F32 Light Reflection Film Thickness Gauge

Filmetrics F32 Light reflection type film thickness gaugeThe special spectral analysis system adopts half-width3u rack- mountChassisAdd the additional onesSpectrophotometerIt can reach four different positions(EXRandUVXThe version can be located at most two positions).F32The software of the film thickness gauge can be accessed digitallyI/OOr use the host software to control the startup/Stop/Reset measurement. The measurement data can be automatically exported to the host software for statistical process control. Optional lens assemblies are also provided for convenienceIntegrate into the existing production facilities.



Filmetrics F32 Light Reflection film thickness gaugeProduct features and advantages

  • Non-contact measurement: Avoids damaging the film, suitable for fragile or sensitive materials;

  • High precision and wide measurement range&The vertical resolution reaches the nanometer level, and the measurable thickness range is from1nmto3mm;

  • Multi-scenario applicability: Basically, all smooth, semi-transparent or low absorption coefficient films can be measured.

  • Fast measurement speed: After configuration is completed, the measurement can be finished within seconds.

  • Pre-installed100A variety of materials make it easy to measure single-layer and multi-layer films

  • Optional lens assemblies are provided for convenienceIntegrate into the existing production facilities.


Filmetrics F32 Light Reflection film thickness gaugeProduct measurement principle

When incident light passes through the interfaces of different substances, some of the light will be reflected. Due to the wave nature of light, the reflected light from multiple interfaces interferes with each other, causing the multi-wavelength spectrum of the reflected light to oscillate. From the oscillation frequency of the spectrum, the distance between different interfaces can be determined, and thus the thickness of the material can be obtained (the more oscillations, the greater the thickness). At the same time, other material properties such as refractive index and roughness can also be obtained.

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Filmetrics F32 Light Reflection film thickness gaugeProduction application and film layer examples:

Film characteristicsThickness, reflectance, transmittance, optical constant, uniformity, etching amount, etc

Types of filmsTransparent and semi-transparent films, commonly such as oxides, polymers and even air

"Film state"Solid, liquid and gaseous films can all be measured

Thin-film structureSingle-layer film, multi-layer film; Plane, curved surface



Filmetrics F32 Light Reflection film thickness gaugeCommon industrial applications of the product:

Semiconductor film layer

Display technology

Consumer electronics

Parrylin

Photoresist

OLED

Waterproof coating

Electronic products/Circuit board

Dielectric layer

ITOandTCOs

Radio Frequency Identification

Magnetic material

Gallium arsenide

Thick air box

Solar cell

Medical devices

Micro-electromechanical system

PVDandCVD

Aluminum shell anode film

Silicone rubber



Filmetrics F32 Light Reflection film thickness gaugeProduct parameters

Wavelength range

380-1050nm

Light source

Halogen lamp

Thickness measurement range

15nm-70um

Measurement accuracy

0.02 nm

Spot size

The distance between the probe and the sample0.007times

Sample stage size

1mm-300mm



Measurement diagram of Filmetrics F32 Light reflection film thickness gauge

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Tags: KLA Filmetrics

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